Objects made of materials that are relatively easy to penetrate with dimensions that are not too large and with average precision requirements can be measured using X-ray tomography with sufficient accuracy. For special tasks, such as measuring components with tight tolerances in the lower micron range, relatively large parts, and dense materials, this is not the case. The use of an additional correction, based on the multisensor approach,   improves the results in these cases.  As is described in detail in Physical Characteristics, the penetration of the measurement object by X-ray radiation leads to systematic measurement errors that are called artifacts. A series of physical effects is responsible for these phenomena. The size of these measurement errors depends greatly on the material composition and geometry of the work piece to be measured.  Because they are not precisely known, the resulting errors can be corrected only partially by analytical methods. Systematic errors thus remain, which limit the measurability of features with tolerances in the lower micron range.  The use of multisensors makes it possible to significantly reduce these residual systematic errors by using additional measurements of the work piece.  The features that are to be measured with higher precision are measured on one of the work pieces using a high precision optical or tactile sensor. The deviations of both measurements are used to calculate a correction array.  This correction array can then be used for measuring additional parts, because the systematic deviations are negligibly different. This correction is referred to as autocorrection.

As seen in image above: Autocorrection: a) Sample part b) Tomographic measurement result with measurement errors (artifacts) image greatly exaggerated c) Tactile or optical measurements of the sample part d) Calculating the deviation array (depicted in a single plane) e) Correction array for use for further measurements f) Further measurement g) Tomographic measurement result with measurement errors and correction array h) Corrected measurement result