The base of the machine frame is of solid granite design. Other system components, such as scales, linear and rotary axes, drives, and guide components come from the family of coordinate measuring machines described above. Using this construction, calibration data such as magnification, rotary axis position and geometric corrections are stable over long periods.

The basic machine construction is shown in Figure 37. The linear axes serve to adjust the magnification of the X-ray sensors for rasterizing during tomography and for classic measurement with tactile and optical sensors. For the latter task, the various sensors and associated probe changer already described can be used. In order to ensure crash-free operation, the X-ray sensors and the other sensors are mounted on separate Z-axes.