Other examples of the measurement of microcomponents include components for optical waveguide connectors with a diameter of approximately 120 µm and microgearwheels with modules measuring approximately 0.1 mm. Further measuring tasks of this type include the measurement of geometries of spinning nozzles used to manufacture ultramodern synthetic fibers and the measurement of stents used to expand damaged blood vessels in medical engineering.

The fiber probe is particularly suitable for measuring microthreads. The sensor must be tilted by a suitable swiveling device in order to measure the threads in the normal section. Alternatively, it is also possible to perform a measurement in the axial section and convert the result mathematically.

Form measurements are also required for many components with microgeometries. Conventional form measurement techniques are not suitable for this purpose due to the size of the required sensors. The smallest form deviations can be measured with sufficient accuracy by using maximum precision coordinate measuring machines in connection with a laser sensor, an image processing sensor and the Werth Fiber Probe (Fig. 65).