By using a high-power transmission target with separate cooling and refocusing of the electron beam, these sources offer focal spot sizes in the sub-micrometer range. Evaluations of micro-structures such as particles, fibers, layer thicknesses, micro-cracks or voids are no problem. With acceleration voltages of up to 240 kV, even small metal workpieces can be tomographed and evaluated with micrometer precision.
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