Interferometer Probe


  • Measurement of components with difficult aspect ratios
  • Motions in workpiece coordinates
  • Scan of micro and macro structures
  • Manufacturing technology allows custom sizes of the fiber diameter (125 µm)

Technical Data

Sensor principle

Optical (short-coherent interferometry)


Permissible probing error up to 0.2 µm



With a super luminescent diode a) and a measuring probe c) connected via a fiber coupler b), the information about the time difference of the light reflected at the probe exit surface d) and the workpiece surface e) is measured .c) and the workpiece surface e) is projected by the interferometer (imaging optics f), beam splitter g), mirrors h) and i) and cylindrical lens j) onto a line camera k) and the distance is determined from this.


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