Optical (short-coherent interferometry)

Interferometer Probe
Highlights
- Measurement of components with difficult aspect ratios
- Motions in workpiece coordinates
- Scan of micro and macro structures
- Manufacturing technology allows custom sizes of the fiber diameter (125 µm)
Technical Data
Sensor principle
Accuracy
Permissible probing error up to 0.2 µm
Functionality
With a super luminescent diode a) and a measuring probe c) connected via a fiber coupler b), the information about the time difference of the light reflected at the probe exit surface d) and the workpiece surface e) is measured .c) and the workpiece surface e) is projected by the interferometer (imaging optics f), beam splitter g), mirrors h) and i) and cylindrical lens j) onto a line camera k) and the distance is determined from this.
Copyright © 2023 | Werth Inc | (860) 399-2445 | 8 Custom Drive, Old Saybrook, CT 06475