Thanks to special air bearing technology, integrated vibration isolation, temperature-stable scale and drive systems and a high-performance control system, the achievable length measurement deviations of the highly accurate (ultra-accuracy) multi-sensor coordinate measuring machine are in the range of a few tenths of a µm. The main areas of application are precision workpieces and 3D micro-geometries.
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Applications
- 3D free-form workpieces
- Extruded workpieces
- Molds
- Semiconductor workpieces
- Lithographic structures
- Metal-plastic composite workpieces
- Prismatic workpieces
- Punched and bent parts
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- Shaft-Hub Connections
- Shafts and Axes
- Workpieces with micro-features
- Optics and Lenses
- Tools with precisely defined cutting edges
- Tools with complex or irregular cutting edges
- Gear wheels
- Cylindrical workpieces
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