learn more

Nano Focus Probe NFP

Highly accurate confocal sensor

Benefits

With the Nano Focus Probe, the workpiece surface can be captured as a 3D point cloud and the size, shape, position and roughness on micro-structures can be evaluated. Stray light suppression enables reliable 3D measurement of the topography even of reflective surfaces with probing errors in the submicrometer range. The confocal optical sensor also delivers good results on steep flanks with large angles of inclination.

Please accept "Other" in the settings to watch this video. Other benefits

Different lenses allow the sensors to be adapted to the respective task
The sensor can be used in the entire measuring volume of the coordinate measuring machine and the measurement results can be linked in the same coordinate system
An overall surface can be calculated from several adjacent partial point clouds with virtually no loss of accuracy

Technical Data

Optical-axial (confocal microscopy)

Measurement "in the image" with integrated Z-axis 250 µm

Permissible probing error up to 0.15 µm

By moving the probe head with a) illumination, b) camera, c) pinhole aperture and d) imaging optics relative to the workpiece e), the intensity of the light points f), g) is varied by defocusing. The overlapping of the defocused light points f) is avoided by using large distances g). Based on the intensity curve, many measurement points on the workpiece surface are determined simultaneously