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Wafer - Round disks of silicon that serve as the basis for ICs

Wafer

Round disks of silicon that serve as the basis for ICs

The most important geometrical characteristic is the flatness of the entire wafer surface.
Wafers are also tested for inclusions and surface damage. The measuring speed requirements for process monitoring are sometimes very high.

ScopeCheck® S

ScopeCheck® S

The multisensor coordinate measuring machine for measuring small workpieces
ScopeCheck® S
Werth Image Processing IP
Sensor
Werth Image Processing IP
Chromatic Focus Point Sensor CFP
Sensor
Chromatic Focus Point Sensor CFP
Chromatic Focus Zoom CFZ
Sensor
Chromatic Focus Zoom CFZ
Werth Zoom
Accessories
Werth Zoom
Telecentric lenses with fixed magnification
Accessories
Telecentric lenses with fixed magnification
Changer retraction axis
Accessories
Changer retraction axis
ScopeCheck® FB

ScopeCheck® FB

Rigid design with fixed bridge for economical production monitoring with low measurement uncertainties
ScopeCheck® FB
Werth Image Processing IP
Sensor
Werth Image Processing IP
Chromatic Focus Point Sensor CFP
Sensor
Chromatic Focus Point Sensor CFP
Chromatic Focus Zoom CFZ
Sensor
Chromatic Focus Zoom CFZ
Chromatic Focus Line Sensor CFL
Sensor
Chromatic Focus Line Sensor CFL
Werth Zoom
Accessories
Werth Zoom
Telecentric lenses with fixed magnification
Accessories
Telecentric lenses with fixed magnification
Changer retraction axis
Accessories
Changer retraction axis
VideoCheck® S

VideoCheck® S

The accurate multisensor coordinate measuring machine for the measurement of small workpieces
VideoCheck® S
Werth Image Processing IP
Sensor
Werth Image Processing IP
Chromatic Focus Point Sensor CFP
Sensor
Chromatic Focus Point Sensor CFP
Chromatic Focus Zoom CFZ
Sensor
Chromatic Focus Zoom CFZ
Chromatic Focus Line Sensor CFL
Sensor
Chromatic Focus Line Sensor CFL
Nano Focus Probe NFP
Sensor
Nano Focus Probe NFP
Werth Zoom
Accessories
Werth Zoom
Telecentric lenses with fixed magnification
Accessories
Telecentric lenses with fixed magnification
Changer retraction axis
Accessories
Changer retraction axis
VideoCheck® FB

VideoCheck® FB

The accurate multisensor coordinate measuring machine for the measurement of large workpieces, with multiple Z-axes on request
VideoCheck® FB
Werth Image Processing IP
Sensor
Werth Image Processing IP
Chromatic Focus Point Sensor CFP
Sensor
Chromatic Focus Point Sensor CFP
Chromatic Focus Zoom CFZ
Sensor
Chromatic Focus Zoom CFZ
Chromatic Focus Line Sensor CFL
Sensor
Chromatic Focus Line Sensor CFL
Nano Focus Probe NFP
Sensor
Nano Focus Probe NFP
Werth Zoom
Accessories
Werth Zoom
Telecentric lenses with fixed magnification
Accessories
Telecentric lenses with fixed magnification
Changer retraction axis
Accessories
Changer retraction axis
VideoCheck® HA

VideoCheck® HA

The highly accurate multisensor coordinate measuring machine for the measurement of large workpieces, with multiple Z-axes on request
VideoCheck® HA
Werth Image Processing IP
Sensor
Werth Image Processing IP
Chromatic Focus Point Sensor CFP
Sensor
Chromatic Focus Point Sensor CFP
Chromatic Focus Zoom CFZ
Sensor
Chromatic Focus Zoom CFZ
Chromatic Focus Line Sensor CFL
Sensor
Chromatic Focus Line Sensor CFL
Nano Focus Probe NFP
Sensor
Nano Focus Probe NFP
Werth Zoom
Accessories
Werth Zoom
Telecentric lenses with fixed magnification
Accessories
Telecentric lenses with fixed magnification
Changer retraction axis
Accessories
Changer retraction axis
VideoCheck® UA

VideoCheck® UA

The ultra-accurate multisensor coordinate measuring machine
VideoCheck® UA
Werth Image Processing IP
Sensor
Werth Image Processing IP
Chromatic Focus Point Sensor CFP
Sensor
Chromatic Focus Point Sensor CFP
Chromatic Focus Zoom CFZ
Sensor
Chromatic Focus Zoom CFZ
Nano Focus Probe NFP
Sensor
Nano Focus Probe NFP
Werth Zoom
Accessories
Werth Zoom
Telecentric lenses with fixed magnification
Accessories
Telecentric lenses with fixed magnification
Changer retraction axis
Accessories
Changer retraction axis
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