NanoFocus Probe


  • Scan of 3D topography of high accurate features
  • Very high point density
  • Suitable to perform non-contact roughness measurements
  • High flexibility using a range of different front lenses

Technical Data

Sensor principle

Optical-axial (confocal microscopy)


Permissible probing error up to 0.15 µm



By moving the probe head with a) illumination, b) camera, c) pinhole and d) imaging optics relative to the workpiece e) the intensity of the light points f), g) is varied by defocusing. The overlapping of the defocused light points f) is avoided by large distances g).


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