Optical-axial (confocal microscopy)

NanoFocus Probe
Highlights
- Scan of 3D topography of high accurate features
- Very high point density
- Suitable to perform non-contact roughness measurements
- High flexibility using a range of different front lenses
Technical Data
Sensor principle
Accuracy
Permissible probing error up to 0.15 µm
Functionality
By moving the probe head with a) illumination, b) camera, c) pinhole and d) imaging optics relative to the workpiece e) the intensity of the light points f), g) is varied by defocusing. The overlapping of the defocused light points f) is avoided by large distances g).